| 7T184-13 (2 pieces) stacked in XY coordinates | 7T184-13 (2 pieces) and 7VT174-10 stacked in XYZ coordinates; 7VT174 (vertical translation stage) on top | 7T184-13 (2 pieces) and 7VT174-10 stacked in XYZ coordinates; 7VT174 (vertical translation stage) at the bottom |